Abstract
A rapid process is described to produce single or multiple electrodes of any shape based on CO_(2) laser ablation for microfluidic chip.The method is as follow: coating a kind of material as sacrifice layer on a piece of glass with sputtered Cr and Au;designing the needed pattern on a computer;selecting proper parameters and ablating with CO_(2) laser;wiping of Au/Cr and sacrifice layer,and obtain electrodes at last.The microfluidic chip was gotten by reversely bonding with a piece of PDMS,and sealing around with PDMS prepolymer.The mask' effect is the main factor that influencing electrode quality.The width of electrodes could be 100 μm.Demonstrated by voltammetry and flow injection amperometric analysis,the microfluidic chip could be used for amperometric detection.
Keywords
Microfluidic chip, Gold electrode, CO_(2) laser
Publication Date
2006-11-28
Online Available Date
2006-11-28
Revised Date
2006-11-28
Received Date
2006-11-28
Recommended Citation
Wei ZHANG, Jiang-qun XIAO, Yong-liang ZHOU.
Fabrication of Gold Electrode Array Based on CO_2 Laser Ablation[J]. Journal of Electrochemistry,
2006
,
12(4): 429-433.
DOI: 10.61558/2993-074X.1767
Available at:
https://jelectrochem.xmu.edu.cn/journal/vol12/iss4/16
References
[1]Reyes D R,Iossifid is D,Auroux P A,et al.M icro totalanalysis system s.1.Introduction,theory,and technol-ogy[J].Anal.Chem.,2002,74(12):2623.
[2]W ang J.E lectrochem ical detection for m icroscale ana-lytical system s:a review[J].Talanta,2002,56(2):223.
[3]Fang Zhao-lun(方肇伦).M icroflu id ic Analytical Ch ip[M].Be ijing:Sc iences Press,2003:286~296.
[4]M artin R S,Gawron A J,Lunte S M.Dual-electrodeelectrochem ical detection for poly(d im ethylsiloxane)-fabricated cap illary electrophoresis m icroch ips[J].Anal.Chem.,2000,72(14):3196.
[5]H ilm i A,Luong J H T.E lectrochem ical detectors pre-pared by electroless deposition for m icrofabricated elec-trophoresis ch ips[J].Anal.Chem.,2000,72(19):4677.
[6]Yan J L,Du Y,L iu J F,et al.Fabrication of integrat-ed m icroelectrodes for electrochem ical detection on elec-trophoresis m icroch ip by electroless deposition and m i-cromold ing in cap illary techn ique[J].Anal.Chem.,2003,75(20):5406.
[7]Chen Der-chang,Hsu Feng-liu,Zhan D ian-zhen,et al.Pallad ium film decoup ler for amperom etric detection inelectrophoresis ch ips[J].Anal.Chem.,2001,73(4):758.
[8]Angnes L,R ichter E M,AugelliM A,et al.Gold elec-trodes from recordab le CD s[J].Anal.Chem.,2000,72(21):5503.
[9]Dan iel D,Gutz I G R.Qu ick production of gold elec-trode sets or arrays and of m icroflu id ic flow cells basedon heat transfer of laser printed toner m asks onto com-pact d iscs[J].E lectrochem.Commn.,2003,5(9):782.
[10]Dan iel D,Gutz I G R.M icroflu id ic cells w ith inter-d igitated array gold electrodes:Fabrication and elec-trochem ical characterization[J].Talanta,2005,68(2):429.
[11]Haefliger D,Cah ill B P,Stemm er A.Rap id prototy-p ing of m icro-electrodes on glass and polym ers by la-ser-assisted corrosion of alum inum film s in water[J].M icroelectron ic Engineering.2003,67-68:473.
[12]Cheng Ji-yen,W e i Cheng-wey,Hsu Kai-hsiung,etal.D irectwrite laserm icrom ach in ing and un iversal sur-face mod ification of PMMA for device develop-m ent[J].Sens.Actuators B,2004,99:186.
Included in
Engineering Science and Materials Commons, Materials Chemistry Commons, Materials Science and Engineering Commons, Physical Chemistry Commons