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Corresponding Author

Chun_ming Wang

Abstract

Some non_ionic surfactants of Polyethylene Glycol 2000,6000 and 20000 were used to estimate the smooth affection on the electrolessly deposited silver film. The adsorption state of the surfactants about Si/solution interface was investigated by using open circuit potential_time technology (Op_t).As comparative experiments, the atomic force microscopy (AFM) was also performed to study the surface smooth effection of the surfactants. It was found that with the increasing of the carbon chain in the surfactants, the smooth effection is getting great. PEG 20000 showed the best smooth function.

Publication Date

2003-02-28

Online Available Date

2003-02-28

Revised Date

2003-02-28

Received Date

2003-02-28

References

[1] KhoperiaTN,TabatadzeTJ,ZedgenidzeTI.Formationofmicrocircuitsbyelectrolessdeposition[J].ElectrochimicaActa,1997,42(20~22):3049.

[2] JiangXiaoxia,ShenWei.TheFundamentalandApplicationofElectrolessPlating[M].Beijing:Nation-alDefenceofIndustryPublishingCompany,2000.

[3] InhergA,ZhuL,Hirschberg,etal.CharacterizationoftheinitialgrowthstagesofelectrolessAg(W)filmsdepositedonSi(100)[J].JournalofTheElectrochemicalSociety,2001,148(12):C784.

[4] YosiScham-Diamond,AlexandraInberg,YelenaSverdlov,etal.Electrolesssilverandsilverwithtungstenthinfilmsformicroelectronicsandmicroelectromechanicalsystemapplications[J].JournalofElectrochemicalSociety,2000,147(9):3345.

[5] YosiShacham-Diamand,ValeryDubin,MatthewAngyal.ElectrolesscopperdepositionforULSI[J].ThinSolidFilms,1995,262:93.

[6] YosiSchacham-Diamond,LopatinS.IntegratedelectrolessmetallizationforULSI[J].ElectrochimicaActa.,1999,44(21-22):3639.

[7] JiangZhaohua,SunDesheng,ShaoGuangjie.SurfaceChemistryofApplicationandTechnology[M].Haerbin:HaerbinIndustrialUniversityPublishingCompany,2000,264.

[8] QueDuanlin,ChenXiuzhi.SiliconMaterialScienceandTechnology[M].Hangzhou:ZhejiangUniver-sityPublishingCompany,2000.

[9] FumioShimiura.SemiconductorSiliconCrystalTechnology[M].AcademicPress,Inc.1989.

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