taC∶N films are a good materials for semiconductor electrodes.But further studies are hampered by the ohmic contact problem,which occurs between the silicon and the lead.By studying the influence of heat treatment on the film's property,it is believed that ohmic contact should be made on the silicon first,and then the film be deposited.A set of taC∶N electrodes with various nitrogen content have been prepared.CV study indicates that the cathodic limits move slowly to positive direction.while the anodic limits are unchanged with the increasing of nitrogen content.As a result,the electrochemical windows get narrow either.


taC∶N electrodes, Ohmic contact, Cyclic voltammetry

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