The Development of Microsystems and New Applications of Electrochemistry

Authors

Zhao wu TIAN, State Key Lab. for Phys. Chem. of Solid Surface, Dept. Chem. Xiamen Univ., X;
Hua-shui LIN, State Key Lab. for Phys. Chem. of Solid Surface, Dept. Chem. Xiamen Univ., X;
Jian-jun SUN, State Key Lab. for Phys. Chem. of Solid Surface, Dept. Chem. Xiamen Univ., X;
Yong-liang ZHOU, State Key Lab. for Phys. Chem. of Solid Surface, Dept. Chem. Xiamen Univ., X;
Yan-bin ZU, State Key Lab. for Phys. Chem. of Solid Surface, Dept. Chem. Xiamen Univ., X;
Zhong-qun TIAN, State Key Lab. for Phys. Chem. of Solid Surface, Dept. Chem. Xiamen Univ., X;
Jin LUO, State Key Lab. for Phys. Chem. of Solid Surface, Dept. Chem. Xiamen Univ., X;
Zhong-hua LIN, State Key Lab. for Phys. Chem. of Solid Surface, Dept. Chem. Xiamen Univ., X;
Zhao_xiong XIE, State Key Lab. for Phys. Chem. of Solid Surface, Dept. Chem. Xiamen Univ., X;
Wei_ling HU, State Key Lab. for Phys. Chem. of Solid Surface, Dept. Chem. Xiamen Univ., X;
Yong_gan HU, State Key Lab. for Phys. Chem. of Solid Surface, Dept. Chem. Xiamen Univ., X;
Wen duan SU, State Key Lab. for Phys. Chem. of Solid Surface, Dept. Chem. Xiamen Univ., X;

Abstract

Brief introduction to microsystems 2 Discussions on the developments of microsystem technologies 3 Applications of electrochemistry in microsystem 3.1 Confined Etchant Layer Technique (CELT) for the complex 3D-pattern micromachining 3.2 Focusing Electrophoresis and the application of microsystem in (bio) chemistry (μTAS or Lab on A Chip) 3.3 Smart Electro-Osmosis pump——a reasonable choosing for microfluidic network 4 Concluding remark

DOI Link

https://doi.org/10.61558/2993-074X.1410

Publication Date

2001-02-28

Online Available Date

2001-02-28

Revised Date

2001-02-28

Received Date

2001-02-28

Recommended Citation

Zhao wu TIAN, Hua-shui LIN, Jian-jun SUN, Yong-liang ZHOU, Yan-bin ZU, Zhong-qun TIAN, Jin LUO, Zhong-hua LIN, Zhao_xiong XIE, Wei_ling HU, Yong_gan HU, Wen duan SU. The Development of Microsystems and New Applications of Electrochemistry[J]. Journal of Electrochemistry, 2001 , 7(1): 1-9.
DOI: 10.61558/2993-074X.1410
Available at: https://jelectrochem.xmu.edu.cn/journal/vol7/iss1/1

References

[1]　TianZW ,FengZD ,TianZQ ,etal.Confinedetchanntlayertechniquefortwo dimensionallithographyathighresolutionusingelectrochemicalscanningtunnelingmicroscope[J].FaradayDiscuss,1992 ,94 :37.

[2 ]　TianZW ,TianZQ ,LinZH .XieZX .Micro (nano )fabricationtechniqueforthreedimensionalcomplexpatterns—theircommondifficultiesandsolution[J].ChineseJournalofScientificInstrument ,1996 ,17(1) :14

[3]　HuangHai gou ,sinJian jun .,TianZhao wuetal.ThreedimensionalmicrofabricationonGaAsusingaregu larpatternsmold[J].Electrochemistry(inChinese) ,2 0 0 0 ,3:2 53.

[4 ]　ZuYB ,XieL ,MaoBW ,TianZW .Studiesonsiliconetchingusingtheconfinedetchantlayertechnique[J].ElectrochimicaActa ,1998,4 3:16 83.

[5]　ChenDong yung ,LinHuashui,TianZhao wuetal.ANovelfocusingelectro phoresistechniquebasedonthemobilitydifferences [J].Electrochemistry(inChinese) ,1997,2 :139.