Chemical Microetching of Three-dimensional Gear-like Pattern on Nickel Surface

Authors

Zhu-fang LIU, 1), JIANG Li-ming~(1), TANG Jing~(1), ZHANG Li~(1), TIAN Zhong-qun~(*1), TIAN Zhao-wu~(1), LIU Pin-kuan~(2),SUN Li-ning~(2) (1.State Key Lab.for Phys.Chem.of Solid Surf.,Depart. of Chem., Xiamen Univ.,Xiamen 361005,China, 2.The Institute of Robots, Harbin Institute of Technology, Harbin 150001, China;

Abstract

The chemical micromachining on nickel surface with three-dimensional (3D) gear-like mold was realized by confined etchant layer technique (CELT). By using effective chemical etching and scavenging system (HNO_(3) + NaOH) and optimizing experimental parameters, such as the etching time, etching current density, concentration of the etchant or and scavenger, we obtained the etched pattern, which is close to negative copy of the mold. The etched micro-pattern characterized by SEM and AFM, demonstrates that CELT can be applied to the 3-D microstructure replication on nickel surface .

DOI Link

https://doi.org/10.61558/2993-074X.1571

Publication Date

2004-08-28

Online Available Date

2004-08-28

Revised Date

2004-08-28

Received Date

2004-08-28

Recommended Citation

Zhu-fang LIU. Chemical Microetching of Three-dimensional Gear-like Pattern on Nickel Surface[J]. Journal of Electrochemistry, 2004 , 10(3): 249-253.
DOI: 10.61558/2993-074X.1571
Available at: https://jelectrochem.xmu.edu.cn/journal/vol10/iss3/1

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