•  
  •  
 

Abstract

Changes in specular reflectivity,weight loss,surface topograph and potential with time and current-potential curves during chemical polishing were determined.The results showed that chemical polishing was composed of the etching,polishing and pitting stage.The passivating film theory also applied to the chemical polishing.

Keywords

Copper, chemical polishing, Reflectivity, surface topograph

Publication Date

1996-08-28

Online Available Date

1996-08-28

Revised Date

1996-08-28

Received Date

1996-08-28

References

1高桥英明,永山政一.化学抛光铝.金属表面技术,1985,36:972ArrowsmithDJ,CunninghamPJ.Chemiealpolishingofaluminium.TransIMF,1980,58:1323TakashiS.Historyforpolishing.J.Met.Finish.Soc.Jpn.,1963,14:129

Share

COinS
 
 

To view the content in your browser, please download Adobe Reader or, alternately,
you may Download the file to your hard drive.

NOTE: The latest versions of Adobe Reader do not support viewing PDF files within Firefox on Mac OS and if you are using a modern (Intel) Mac, there is no official plugin for viewing PDF files within the browser window.