Abstract
Microsystem or micro electromechanical system (MEMS) is briefly introduced. The electrochemical applications in microsystem are reviewed and prospective applications of microsystem in electrochemistry are discussed. Along with the rapid development of micro_ analytical chemical systems or lab_on_chips in 21st century, electrochemistry may play an increasingly important role in microsystem technology.
Keywords
Microsystem, MEMS, Electrochemistry
Publication Date
2000-02-28
Online Available Date
2000-02-28
Revised Date
2000-02-28
Received Date
2000-02-28
Recommended Citation
Zhong_qun TIAN, Jian-jun SUN.
Microsystem and electrochemistry[J]. Journal of Electrochemistry,
2000
,
6(1): Article 8.
DOI: 10.61558/2993-074X.3206
Available at:
https://jelectrochem.xmu.edu.cn/journal/vol6/iss1/8
References
[1] DingHG .Micro - /nanotechnology—Lookingonboththemilitaryandtheciviltechnologyin 2 1thcentury[J].ChineseJournalofScientificinstrument.1995 ,16 (1) :1.
[2 ] WangWY .Semiconductorsensorandmicroelectromechanicalsystems[M ].Changsha :HunanScience&TechnologyPress,1999.
[3] ZhangLG .TheimportanceofdevelopingMEMS .SymposiumonIntegretedMicro -optp -electro -me chanicalSystems[C].Shangahi,March 6 ,1999.
[4 ] ManzA ,BeckerH ,Eds.MicrosystemtechnologyinchemistryandlifeScience[M ].Berlin :Springer ,1998,5 1.
[5 ] MotamediME ,WuMC ,PisterKSJ.Micro_opto_electro_mechanicaldevicesandon_chipopticalprocessing[J].OpticalEngineering ,1997,36 :12 82 .
[6 ] WuMC .MicromachiningforopticalandOptoelectronicsystems[J].ProceedingofIEEE ,1997,85 :1883.
[7] MaL .Biochips—AmiraculousadvanceinbiotechnologyafterPCR[J].ModernScientificinstruments,1999,3:3.
[8] XiaoS .FabricatingthefastestCPUintheworld[J].ChineseComputerUsers,1997,4:9.
[9] AndricacosPC .Copperon_chipinterconnections :Abreakthroughinelectrodepositiontomakebetterchips[J].Interface,1999,8:32 .
[10 ] RomankiwLT .Apath :fromelectroplatingthronghlithograghicmasksinelectronicstoLIGAinMEMS[J].Electrochimicaacta ,1997,42 :2 985 .
[11] ZhouZY ,YEXY ,LiY ,YangY ,etal.MicroSystemandMicroManufacturing[J].Micro-andNanometerScience&Technology,1996 ,12 (1) :1.
[12 ] CohenAetal.EFAB :Low_Cost,AutomatedElectrochemicalBatchFabricationofArbitrary 3_DMi crostructures.MicromachiningandMicrofabricationProcessTechnology ,SPIE 1999SymposiumonMicro machiningandMicrofabrication[C].SantaClara ,CA ,September 2 2 ,1999.
[13] CohenA .etal.EFAB :Rapid ,Low_CostDesktopMicromachiningofHighAspectRatioTrue 3_DMEMS .12thIEEEInternationalMicroelectromechanicalSystemsConference[C],1999,TechnicalDigest,IEEE .
[14] CohenAetal.EFAB :BatchProductionofFunctional,Fully_DenseMetalpartswithMicron_ScaleFea tures .SolidFreeformFabricationSymposium 1998,Proceedings[C].TheUniversityofTexasatAustin .
[15 ] TianZW ,FengZD ,TianZQetal.ConfinedEtchantLayerTechniqueforTwo_dimensionalLithographyatHighResolutionusingElectrochemicalScanningTunnelingMicroscopy[J].FaradayDiscussion ,1992 ,94:37.
[16 ] TianZW ,TianZQ ,LinZH ,XieZX .Micro- (Nano - )FabricationTechniquesforThreeDimensionalComplexPatterns—TheirCommonDifficultiesandSolutions[J].ChineseJournalofScientificInstrument,1996 ,17(1) :14.ZuYB ,XieL ,MaoBW ,TianZW ,TianZW .StudiesonSiliconEtchingUsingtheConfinedEtchantLayerTechnique[J].ElectrochimicaActa ,1998,43:16 83.
[17] ZuYB ,XieL ,MaoBW ,TianZW .StudiesonSiliconEtchingUsingtheConfinedEtchantLayerTech nique[J].ElectrochimicaActa,1998,43:16 83.
[18] BirkeP ,WeppnerW .Electrochemicalanalysisofthinfilmelectrolytesandelectrodesforapplicationinrechargeableallsolidstatelithiummicrobatteries[J].Electrochimicaacta,1997,42 :3375 .
[19] PetersenK .Frommicrosensortomicroinstrument[J].SensorandActuators ,1996 ,A5 6 :143.
[2 0 ] JackmanRJ ,BrittainST ,AdamsA ,PrentissMG ,WhitesidesGM .DesignandFabricationoftopologi callycomplex ,three_dimensionalmicrostructures[J].Science,1998,2 80 :2 0 89.
[2 1] LeuthSD ,SchwartzDT .Through_moldelectrodepositionusingtheuniforminjectioncell(UIC) :Work pieceandpatternscaleuniformity[J].ElectrochimicaActa,1999,44 :40 17.
[2 2 ] ShinouraO ,KoyanagiT .Magneticthinfilmheadwithcontrolleddomainstructurebyelectroplatingtech nology[J].ElectrochimicaActa,1997,42 :336 1.
[2 3] GewirthAA ,NieceBK .Electrochemicalapplicationofinsituscanningprobemicroscopy[J].Chem .Rev .,1997,97:112 9.
[2 4] ChenRR ,MoYB ,SchersonDA .Insituatomicforcemicroscopy,imagingofelectroprecipitatednickelhydrousoxidefilmsinalkalineelectrolytes[J].Langmuir,1994,10 :3933.
[2 5 ] ChenC_H ,VeseckySM ,GewirthAA .InsituatomicforcemicroscopyofunderpotentialdepositionofAgonAu(111) [J].J.Am .Chem .Soc .,1992 ,114:45 1.
[2 6 ] ChenL ,GuayD .Selecteddissolutionofaluminuminitiatedbyatomicforcemicroscopetip_surface[J].J .Electrochem .Soc.,1994,141:L43.
[2 7] CaiXW ,.GaoJS ,XieZX ,XieY ,TianZQandMaoBW .NanomodificationofPolypyrroleandpolyanilineonHighlyOrientedPyrolyticGraphiteElectrodesbyAtomicForceMicroscopy[J].Langmuire ,1998,14:2 5 0 8.
[2 8] ReddingtonE ,SapienzaA ,GurauB ,ViswanathanR ,SarangapaniS ,SmotkinES ,MalloukTE .Combi natorialelectrochemistry :ahighlyparallel,opticalscreeningmethodfordiscoveryofbetterelectrocatalysts[J].Science,1998,2 80 :1735 .