Fabrications and Characterizations of Porous Silicon by Two-step Techniques II: Pulse Current Application

Authors

Xuan CHENG, Dept. of Chem.,;
Feng ming LIU, Dept. of Chem.,;
Zuo xin WEN, Dept. of Chem.,;
Chang jian LIN, State Key Lab. for Phys. Chem. of Solid Surfaces,;
Zhong-qun TIAN, Dept. of Chem.,;
Ru XUE, Center for Instrumental Anal. and Measurements, Xiamen Univ., Xi;

Corresponding Author

Xuan CHENG(xcheng@xmu.edu.cn)

Abstract

Porous silicon structures were formed by two?step technique consisting of pulse current applications in 1∶1 hydrofluoric acid and ethanol solutions and chemical oxidation in 20% nitric acid solutions. Their surface morphologies and optical properties were characterized by scanning electron microscope (SEM) and Raman spectrometer, and compared with those obtained by constant current application. More uniform pore formation on p(100) silicon wafers was observed by pulse current application. Illumination with an ultraviolet lamp during the pulse current application accelerated the macropore formation, accordingly, the optical properties were changed.

DOI Link

https://doi.org/10.61558/2993-074X.3242

Publication Date

2001-02-28

Online Available Date

2001-02-28

Revised Date

2001-02-28

Received Date

2001-02-28

Recommended Citation

Xuan CHENG, Feng ming LIU, Zuo xin WEN, Chang jian LIN, Zhong-qun TIAN, Ru XUE. Fabrications and Characterizations of Porous Silicon by Two-step Techniques II: Pulse Current Application[J]. Journal of Electrochemistry, 2001 , 7(1): Article 22.
DOI: 10.61558/2993-074X.3242
Available at: https://jelectrochem.xmu.edu.cn/journal/vol7/iss1/22

References

[1]　ChengX ,LiuFM ,WenZXetal.Fabricationsandcharacterizationsofporoussiliconbytwo -steptech niques ,I:ConstantCurrentApplication[J].Electrochemistry(inChinese) ,2 0 0 1,6 (4 ) ,399～ 4 0 5.

[2 ]　BrandtMS ,FuchsHD ,StutzmannM ,etal.Theoriginofvisibleluminescencefrom‘poroussilicon’ :Anewinterpretation[J].SolidStateCommun .1992 ,81(4 ) ,30 7～ 312 .